Simulation Study of Sputtering Yield of Zn Target Bombarded By Xenon Ions

Abstract

Using a reduction of TRIM simulation data, the sputtering yield behaviour of Zinc targetbombard by heavy Xenon ions plasma is studied. The sputtering yield as a function of Zinclayer width, Xenon ion number, energy of ions, and the angle of ion incidence are calculatedand illustrated graphically. The corresponding energy loss due to ionization, vacancies andphonons, are graphically shown and discussed. Further, we fit the calculations andexpressions for fitted curves are presented with its coefficients.