Morphological and Optical Properties of Porous Silicon


Abstract- In this work photo-electrochemical etching was used tosynthesize uniform and non-uniform macro porous silicon from n-typewith orientation (100). Specimens were anodized in a sol of 25% HF:C2H2OH at 1:1 rate. Morphology and porosity of the samples werestudied. Optical characteristics (reflection and photoluminescence) ofPS samples by changing current density (10, 12, 14 and 16 mA/cm2) forfixed etching time (8min) and power density (17mW/cm2) by using redlaser illumination wavelength (645nm) were investigated. Porous siliconsamples imaged via scanning electron microscope (SEM), which showedthe topography of silicon surface and pores distribution.