Physical Properties of MOS Porous Silicon Detector Fabricated under RTO Method

Abstract

In this research we studying the sensitivity of a porous silicon photo detector, wefound it improved through rapid thermal oxidation processes. Under our optimumpreparation conditions, photocurrent can reach about 3408 μA (under power density 100mW/cm2 tungsten lamp illumination) and dark current is about 300μA(at reverse bias of 5V).