Morphology Investigation of Carbon Nanostructures Synthesized with Gold Catalytic Chemical Vapor Deposition CCVD.


Carbon nanostructures with chemical vapor deposition (CVD) were successfully grown on silicon (100) pre-coated with gold nanoparticles as a catalyst using electrochemical method. Different thicknesses of gold films (10nm, 20nm, 80nm,140nm, 170nm, and 280nm) were used. These films were thermally annealed at temperature of 600ºC for 1h with argon environment. The CNTs were grown at 700ºC, argon and acetylene as a precursor source of carbon (Ar -500sccm, C2H2 -200sccm). The gold deposition after annealing was characterized by atomic force microscopy (AFM). The produced carbon nanostructures were also characterized with scanning electron microscope (SEM), and transmission electron microscope (TEM). The observed carbon structures of the SEM and TEM results are straight, curved, helical, and Y-junction with diameter rang of 100nm-200nm, which is attributed to carbon nano fibers with different size and shape of gold catalyst nanoparticles.