TY - JOUR ID - TI - A Study on the Structural, Optical and Electrical Properties of Tungsten TrioxideWO3Thin Film for Gas Sensing Applications دراﺳﺔ اﻟﺨﺼﺎﺋﺺ اﻟﺘﺮﻛﯿﺒﯿﺔ واﻟﺒﺼﺮﯾﺔ واﻟﻜﮭﺮﺑﺎﺋﯿﺔ ﻻﻏﺸﯿﺔ اوﻛﺴﯿﺪ اﻟﺘﻨﻜﺴﺘﻦ اﻟﺮﻗﯿﻘﺔ ﻟﺘﻄﺒﯿﻘﺎت ﻣﺘﺤﺴﺴﺎت اﻟﻐﺎز AU - Adawiya J. Haider AU - Huda A. Mutasher PY - 2015 VL - 33 IS - 8 Part (B) Scientific SP - 1473 EP - 1482 JO - Engineering and Technology Journal مجلة الهندسة والتكنولوجيا SN - 16816900 24120758 AB - The pulsed laser deposition method, PLD, has been used in this project to deposit the pure Wo3 The aim was to study the influence of temperature on surface morphology of the deposits materials using Atomic Force Microscope measurements at different temperatures of (RT,300 ,400)°C. The structural characteristics of the films prepared on glass substrates have been studied by using X-ray diffraction and AFM. These tests show that there is a direct relationship between the grain sizes of the nanoparticles observed at the surface and influence of temperature which means as temperature increases there will be a similar enhancement in the grain size as well. Additionally, we were able to find that the best of temperature was 400ᵒC. Furthermore, the characterizations of the gas sensing of these thin films were strongly influenced by the surface morphology. It has been also found that nanocrystalline Wo3 gas sensing material was presented a better sensitivity as temperature increases

ﻓﻲ ھﺬا اﻟﻌﻤﻞ اﺳﺘﺨﺪﻣﺖ طﺮﯾﻘﮫ اﻟﺘﺮﺳﯿﺐ ﺑﻠﻠﯿﺰر اﻟﻨﺒﻀﻲ ﻟﺘﺮﺳﺐ ﺛﻼﺛﻲ اوﻛﺴﯿﺪ اﻟﺘﻨﻜﺴﺘﻦ وﺗﮭﺪف ﻟﺪراﺳﮫ تأثير درﺟﮫ اﻟﺤﺮاره اﻟﺘﺮﺳﯿﺐ ﻋﻠﻰ ﻣﻮرﻓﻮﻟﻮﺟﯿﮫ اﻟﺴﻄﺢ ﻟﻠﻤﻮاد اﻟﻤﺘﺮﺳﺒﮫ ﺑﺎﺳﺘﻌﻤﺎل اﻟﻤﺠﮭﺮ اﻟﻘوة اﻟذرﯾﺔ و اﻟﻨﺘﺎﺋﺞ ﺑﯿﻨﺖ ان ھﻨﺎﻟﻚ ﻋﻼﻗﮫ ﻣﺒﺎﺷﺮ ﺑين اﻟﺤﺠﻢ اﻟﺤﺒﯿﺒﻲ ﻟﻠﺘﺮاﻛﯿﺐ اﻟﻤﻼﺣظﮫ ﻋﻨﺪ اﻟﺴﻄﺢ وﺗﺄﺛﺮ درﺟﮫ اﻟﺤﺮارة وھﺬا ﯾﻌﻨﻲ ﻋﻨﺪ زﯾﺎدةدرﺟﮫ اﻟﺤﺮاره ﯾﺰداد اﻟﺤﺠﻢ اﻟﺤﺒﺒﯿﺒﻲ وﻛﺎﻧﺖ اﻓﻀﻞ درﺟﮫ ﺣﺮاره ھي400 ﺳﻠﯿﺰي .كما ان ﻣﻮرﻓﻮﻟﻮﺟﮫ اﻟﺴﻄﺢ ﻟﮭﺎ ﺗﺎﺛﯿﺮ ﻋﻠﻰ اﻟﺨﺼﺎﺋﺺ اﻟﺘﺤﺴﺴﯿﮫ ﻟﮭﺬه الاغشية وأﯾﻀﺎ وﺟﺪاﻟﺘﺤﺴﺴﯿﮫ ﺛﻼﺛﻲ اوﻛﺴﯿﺪ اﻟﺘﻨﻜﺴﺘﻦ ﺗﺰداد ﻣﻊ زﯾﺎده درﺟﮫ اﻟﺤﺮاره . ER -