@Article{, title={FE-SEM and EDX Analysis of N-Doped TiO2 and Co3O4 Nanostructures Prepared by DC Reactive Sputtering}, author={Noor Alhuda H. Hashim, Firas J. Kadhim}, journal={Iraqi Journal of Applied Physics Letters مجلة الرسائل العراقية في الفيزياء التطبيقية}, volume={6}, number={1}, pages={11-14}, year={2023}, abstract={In this work, field-emission scanning electron microscopy (FE-SEM) and energy-dispersive x-ray spectroscopy (EDX) were performed on the nitrogen-doped titanium dioxide (N-doped TiO2) and cobalt oxide (Co3O4) nanostructures prepared by dc reactive magnetron sputtering technique. Results of the FE-SEM showed that the N-doped TiO2 sample exhibits homogeneity of particle distributions and the minimum particle size was found 28.09 nm. As well, the Co3O4 sample contains spherical nanoparticles with a minimum particle size of 37.32 nm. The EDX results showed that the weight percentages of Ti, O and N in the final N-doped TiO2 sample were 49.1%, 40.7%, and 0.9%, respectively, which may confirm the role of nitrogen as a dopant in the structure of TiO2. Also, the EDX results showed that the elemental composition of the Co3O4 sample consists of 72.3% Co and 19.9% O2, which is corresponding to the structural phase of Co3O4.

} }