@Article{, title={FE-SEM and EDX Analysis of N-Doped TiO2 and Co3O4 Nanostructures Prepared by DC Reactive Sputtering}, author={N.A.H. Hashim, F.J. Kadhim}, journal={Iraqi Journal of Applied Physics Letters مجلة الرسائل العراقية في الفيزياء التطبيقية}, volume={4}, number={1}, pages={11-14}, year={2021}, abstract={In this work, the field-emission scanning electron microscopy (FE-SEM) and energy-dispersive x-ray spectroscopy (EDX) were performed on the nitrogen-doped titanium dioxide (N-doped TiO2) and cobalt oxide (Co3O4) nanostructures prepared by dc reactive magnetron sputtering technique. Results of the FE-SEM showed that the N-doped TiO2 sample exhibits homogeneity of particle distributions and the minimum particle size was found 28.09 nm. As well, the Co3O4 sample contain spherical nanoparticles with minimum particle size of 37.32 nm. The EDX results showed that the weight percentages of Ti, O and N in the final N-doped TiO2 sample were 49.1%, 40.7%, and 0.9%, respectively, which may confirm the role of nitrogen as dopant in the structure of TiO2. Also, the EDX results showed that the elemental composition of the Co3O4 sample consist of 72.3% Co and 19.9% O2, which is corresponding to the structural phase of Co3O4.

} }