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Preparation of Cu thin film by cylindrical magnetron sputtering device
Iraqi Journal of Physics, 2009, Volume 7, Issue 8, Pages 25-32
The axial profile of plasma characteristics of cylindrical magnetron sputtering device
Iraqi Journal of Physics, 2010, Volume 8, Issue 11, Pages 41-47
Investigation of plasma characteristics of center region of postcylindrical magnetron sputtering device
Iraqi Journal of Physics, 2010, Volume 8, Issue 11, Pages 33-40
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