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Key Mechanisms of Low-Pressure Glow Discharge in Magnetized Plasmas

الاليات الاساسية للتفريغ التوهجي ذي الضغط الواطيء في البلازما الممغنطة

Oday A. Hammadi --- Mohammed K. Khalaf --- Firas J. Kadhim --- Bahaa T. Chiad

Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية
ISSN: 18132065 23091673 Year: 2016 Volume: 12 Issue: 3 Pages: 3-10
Publisher: iraqi society for alternative and renewable energy sources and techniques الجمعية العراقية لمصادر وتقنيات الطاقة البديلة والمستجدة

Abstract

In this article, the key mechanisms of glow discharge in low-pressure gas mixtures were presented and discussed. The particle motions – mainly collisions – in discharge plasma those considered in most applications of plasma were presented. The regions of glow discharge were identified and their main characteristics were highlighted. These mechanisms were supported by experimental results obtained from a homemade dc plasma sputtering system. The experimental parameters, such as inter-electrode distance, using magnetrons and adding nitrogen to the gas mixture, and their effects on the Paschen’s curve of glow discharge were introduced.

Keywords

Glow discharge --- Particle motion --- Magnetron plasma --- Low-pressure plasma