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Langmuir Probe Diagnostics of Low-Pressure Glow Discharge Plasma Using Argon-Nitrogen Mixtures

التشخيص باستخدام مجس لانجمور لبلازما التفريغ ذي الضغط الواطئ باستخدام خلائط غازي الاركون والنتروجين

Bahaa T. Chiad --- Oday A. Hammadi --- Firas J. Kadhim --- Mohammed K. Khalaf

Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية
ISSN: 18132065 23091673 Year: 2016 Volume: 12 Issue: 3 Pages: 17-26
Publisher: iraqi society for alternative and renewable energy sources and techniques الجمعية العراقية لمصادر وتقنيات الطاقة البديلة والمستجدة

Abstract

In this work, experimental results on Langmuir probe diagnostics of low-pressure glow discharge plasma using argon-nitrogen mixtures are presented. The effect of variation in working pressure on the current-voltage characteristics of Langmuir probe diagnostics in unmagnetized glow-discharge plasma was introduced. The current-voltage characteristics of Langmuir probe diagnostics in glow-discharge plasma were studied at working pressure of 0.7mbar and three different cases (no magnetron, using one magnetron at the cathode, and using dual magnetrons). Similarly, the current-voltage characteristics of Langmuir probe in glow-discharge plasma at three different positions of the Langmuir probe inside plasma volume were presented. The variation of electron temperature and density in plasma with working gas pressure at the center point between the electrodes when dual magnetrons were used was determined. As well, the effect of mixing nitrogen with argon on the Langmuir probe characteristics at total working pressure of 0.7mbar and inter-electrode distance of 4cm was studied.

Keywords

Langmuir diagnostics --- Plasma parameters --- Glow discharge --- Sputtering