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Structural Properties of Nickel Oxide Nanostructures Prepared by Closed-Field Unbalanced Dual Magnetron Sputtering Technique

Firas J. Kadhim --- Oday A. Hammadi --- Mohammed K. Khalaf

Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية
ISSN: 18132065 23091673 Year: 2017 Volume: 13 Issue: 2 Pages: 3-10
Publisher: iraqi society for alternative and renewable energy sources and techniques الجمعية العراقية لمصادر وتقنيات الطاقة البديلة والمستجدة

Abstract

In this work, nickel oxide nanostructures were prepared by a closed-field unbalanced dual magnetron plasma sputtering technique. The structural characterizations performed on the prepared samples showed that they were polycrystalline and the optimization of preparation conditions, only two crystal planes; (111) and (012), were observed in the final product. The surface roughness of the nanostructures can be varied by controlling the inter-electrode distance. Minimum particle size of 25nm was determined for the samples prepared at inter-electrode distance of 6cm.

Keywords

Nickel oxide --- Nanostructures --- Magnetron sputtering --- Plasma sputtering