Theoretical Study and Simulation of Corrugated Silicon

Abstract

In this paper, silicon diaphragms with planar and corrugated shapes are studied through both theory and simulations. The analytical calculations of deflections areared with FEM simulations with good agreement. The results show that linearload-deflection relationship can be obtained by increasing corrugation depth andcorrugation pitch did not show any noticeable effect compared to other parameters.Therefore the rule of thumb in the design of a corrugated diaphragm is that increasingdiaphragm diameter and/or decreasing diaphragm thickness increase diaphragmsensitivity and that increasing corrugation depth increases the linearity of load-deflection relation.