Optical Response Chracterization of In2O3/c-Si Made by Spray Pyrolysis

Abstract

In2O3 thin films have been deposited on silicon substrate by chemical spray pyrolysis. These films show high transparency in the visible and near-IR regions. Photoresponse of In2O3/c-Si isotype hetero-photodiode without post-deposition heat treatment has been investigated in the visible and infrared regions. Peak response situated at 600nm was observed. External quantum efficiency was 32% at peak response. C-V measurements revealed that the junction was abrupt type and built-in potential around 1eV has been obtained.