Characterization of Indium Oxide Thin Films Grown on Silicon Substrates by Spray Pyrolysis Technique

Raid A.I. --- Omar A.A

Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية
ISSN: 18132065 23091673 Year: 2013 Volume: 9 Issue: 2 Pages: 11-14
Publisher: iraqi society for alternative and renewable energy sources and techniques الجمعية العراقية لمصادر وتقنيات الطاقة البديلة والمستجدة


In2O3 thin films have been deposited on silicon substrate by chemical spray pyrolysis. These films show high transparency in the visible and near-IR regions. Photoresponse of In2O3/c-Si isotype hetero-photodiode without post-deposition heat treatment has been investigated in the visible and infrared regions. Peak response situated at 600nm was observed. External quantum efficiency was 32% at peak response. C-V measurements revealed that the junction was abrupt type and built-in potential around 1eV has been obtained.


Thin films --- Spray Pyrolysis --- Optical response --- Heterojunction