Study the Sputtering of Au atoms Irradiated by Ar , Kr and Xe Ions

Abstract

The theoretical study of Sputtering for gold atoms irradiated by normal incidence of Ar , Kr and Xe ions depend on energy and atomic number (Z1) of ions and atomic number (Z2) of the target , the essential dependence of sputtering is the nuclear stopping power .The Sputtering yield of Au atoms irradiated by Xe ions are larger than that of other bombarding ions. It was found that the sputtering yield of Au atoms increased up to 300 keV for Kr ions and 400 keV for Xe ions , after that , the sputtering yield is decreased , on the other hand , sputtering of Au atoms decreased for 100-1000 keV of Ar ions , this results depend on deposited nuclear energy ( nuclear stopping power ), which in turn depends on the masses of bombarding the ions and the target . It was also found that sputtering yield is directly proportional to the ratio (Z1/Z2) at constat incident ions energy for the same target.This study is the tool to indicate what are the energy and kind of irradiated ions used for getting the required sputtering yield of gold atoms to apply for different technological uses .