Morphological and Optical Properties of In_2 O_3:Sn Thin Films Deposited by Spray Pyrolysis

Abstract

The morphological and optical properties of indium tin oxide (ITO) thin films have been studied in this paper. Tin doped indium oxide thin films were deposited successfully on glass substrates at (450±10)℃ for various tin doping (0, 5, 10, 15, 20) % by spray pyrolysis technique. Atomic force microscopy has been used to study the surface morphology of In_2 O_3:Sn thin films. The optical properties were calculated by the absorbance and transmittance spectra in the wavelength interval (300-1000) nm. The optical constants such as (absorption coefficient, refractive index, extinction coefficient, real and imaginary parts of dielectric constant and optical conductivity) have been calculated and discussed.