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Magnetic Field Distribution of Closed-Field Unbalanced Dual Magnetrons Employed in Plasma Sputtering Systems
توزيع المجال المغناطيسي لمجمع الماكنترون المزدوج غير المستقر ذي المجال المغلق والمستخدم في منظومات الترذيذ بالبلازما

Authors: Wisam A. Altun --- Mohammed A. Saleh --- Waleed N. Raja --- Oday A. Hammadi
Journal: Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية ISSN: 18132065 23091673 Year: 2016 Volume: 12 Issue: 3 Pages: 35-42
Publisher: iraqi society for alternative and renewable energy sources and techniques الجمعية العراقية لمصادر وتقنيات الطاقة البديلة والمستجدة

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Abstract

In this work, the spatial distribution of the magnetic field between two magnetrons in a closed-field unbalanced dual magnetron system was studied. The magnetic field was measured as a function of the position along the circumference of the circular surface of one magnetron. As well, the variation of magnetic field intensity along the vertical distance separating the two magnetrons was determined. A strategy was proposed for the measurement of the variation of magnetic field intensity at 4 cm away from the electrode surface along four axes. The spatial distribution of the magnetic field intensity over the magnetron surface at 4cm was determined and analyzed.


Article
Employment of Magnetron to Enhance Langmuir Probe Characteristics of Argon Glow Discharge Plasma in Sputtering System

Authors: Oday A. Hammadi --- Waleed N. Raja --- Mohammed A. Saleh --- Wisam A. Altun
Journal: Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية ISSN: 18132065 23091673 Year: 2016 Volume: 12 Issue: 4 Pages: 19-28
Publisher: iraqi society for alternative and renewable energy sources and techniques الجمعية العراقية لمصادر وتقنيات الطاقة البديلة والمستجدة

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Abstract

In this study, the parameters affecting the Langmuir characteristics of a closed-field unbalanced magnetron plasma sputtering system were studied. These parameters include the effect of variation in working pressure on the current-voltage characteristics of Langmuir probe diagnostics in unmagnetized glow-discharge plasma. Also, the current-voltage characteristics of Langmuir probe diagnostics in glow-discharge plasma at working pressure of 0.7mbar and three different cases (no magnetron, using one magnetron at the cathode, and using dual magnetrons) were introduced. The current-voltage characteristics of Langmuir probe in glow-discharge plasma at three different positions of the Langmuir probe inside plasma volume were determined. The variation of electron temperature and density in plasma with working gas pressure was determined at the center point between the electrodes when dual magnetrons were used. Finally, the effect of mixing nitrogen with argon on the Langmuir probe characteristics at total working pressure of 0.7mbar and inter-electrode distance of 4cm was introduced.

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