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Article
Effect of Adding Nitrogen to the Gas Mixture on Plasma Characteristics of a Closed-Field Unbalanced DC Magnetron Sputtering System

Authors: Firas J. Kadhim --- Mohammed K. Khalaf --- Oday A. Hammadi
Journal: Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية ISSN: 18132065 23091673 Year: 2014 Volume: 10 Issue: 1 Pages: 27-31
Publisher: iraqi society for alternative and renewable energy sources and techniques الجمعية العراقية لمصادر وتقنيات الطاقة البديلة والمستجدة

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Abstract

In this work, the role of adding nitrogen gas to the discharge gas mixture containing argon was studied by introducing the electrical characteristics of plasma generated between two closed-field unbalanced magnetron electrodes. This role was also related to the presence and absence of magnetron at the electrodes in the fundamental design of such sputtering system. The role of nitrogen gas added to the gas mixture was reasonably observed by enhancing the electrical characteristics of the glow discharge plasma generated between the dual CFUBM electrodes. Adding nitrogen caused to increase the concentration of the charged particles produced by collisional ionization in discharge volume as the mean free path of primary discharge electrons was reduced. A relative reduction in electron temperature was observed as a result of adding nitrogen with increase in electron and ion densities while no observed difference was observed in the ion temperature due to their larger masses compared to those of electrons.


Article
Influence of Inter-Electrode Distance, Gas Mixing, Magnetic Field and Cathode Material on Breakdown Voltage of Lab-Made DC Magnetron Sputtering Device

Authors: Mohammed K. Khalaf --- Ibrahim R. Agool --- Shaimaa H. Abd Muslim
Journal: Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية ISSN: 18132065 23091673 Year: 2014 Volume: 10 Issue: 4 Pages: 21-25
Publisher: iraqi society for alternative and renewable energy sources and techniques الجمعية العراقية لمصادر وتقنيات الطاقة البديلة والمستجدة

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Abstract

In this paper, the effect of inter-electrode distance, gas mixing, magnetic field and cathode materials on breakdown voltage in DC glow discharge of argon and argon-oxygen plasma is presented. The results showed an increased breakdown voltage when inter-electrode distance and oxygen percentage in (Ar∕O2) gas mixture increased. At lower pressure, the breakdown voltage decreases by increasing the magnetic field, while at higher pressure, the breakdown voltage becomes less sensitive to the magnetic field. Moreover, the lower breakdown voltages are associated with smaller work function of the cathode material.


Article
Design and Construction of Argon D.C Glow Discharge Plasma Using Al Target

Authors: Mohammed Odda Dawood محمد عودة داوود --- Abdul Qader Dawood Faisal عبد القادر داوود
Journal: Journal of Kufa - physics مجلة الكوفة للفيزياء ISSN: 20775830 Year: 2014 Volume: 6 Issue: 2 arabic and English Pages: 1-6
Publisher: University of Kufa جامعة الكوفة

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Abstract

AbstractIn this work, we have successfully designed and constructed argon D.C glowdischarge plasma. A planer D.C diode system consisted of two aluminum electrodeswhich were designed and constructed to study Paschen's curves at two differentinterelectrode distances (3cm and 4.5cm). The breakdown voltage (Vb) wasexperimentally measured as a function of the pressure product of inter-electrode distance(Pd) for argon discharges gas. The behaviour of breakdown voltages as a function of (pd)coincide with Paschen’s law at the two different interelectrode distances. The minimumbreakdown voltages were (Vb) min =(232, 244)volt for d=(3, 4.5)cm respectively and theminimum pressure product by the inter-electrode distance namely pdmin=. (1.1,1.5)mbar.cm at the two above distances.

الخلاصةدایود المستویة D.C لتوھج البلازما لغاز الأركون. منظومة ال D.C في ھذا البحث تم بناء وتصمیم منظومةاحنوت على قطبین من الألمنیوم عندما صممت وركبت لدراسة منحنیات باشن عند مسافتین مختلفة ما بین الأقطابقیست عملیا كدالة لحاصل ضرب الضغط بالمسافة مابین الأقطاب (Vb)min 3) . فولتیة الأنھیار , 4.5)cm مقدارھا3) على , 4.5)cm للمسافة (Vb)min=(232, 244)volt لتوھج غاز الأركون. فولتیة الأنھیار الصغرى (pd)minpdmin=( التوالي. القیمة الصغرى للضغط مضروب بالمسافة مابین الأقطاب كانت قیمتھا على التوالي , 1.11.5 لتلك المسافتین.


Article
A Comparative Study on the Electrical Characteristics of Generating Plasma by Using Different Target Sources
دراسة مقارنه للخصائص الكهربائية للبلازما المتولدة من أهداف مختلفة

Authors: Sarah K. Taha سارة خضير طه --- Sabah N. Mazhir صباح نوري مزهر --- Mohammed K. Khalaf محمد خماس خلف
Journal: Baghdad Science Journal مجلة بغداد للعلوم ISSN: 20788665 24117986 Year: 2018 Volume: 15 Issue: 4 Pages: 436-440
Publisher: Baghdad University جامعة بغداد

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Abstract

In this research, the electrical characteristics of glow discharge plasma were studied. Glow discharge plasma generated in a home-made DC magnetron sputtering system, and a DC-power supply of high voltage as input to the discharge electrodes were both utilized. The distance between two electrodes is 4cm. The gas used to produce plasma is argon gas which flows inside the chamber at a rate of 40 sccm. The influence of work function for different target materials (gold, copper, and silver), - 5cm in diameter and around 1mm thickness - different working pressures, and different applied voltages on electrical characteristics (discharge current, discharge potential, and Paschen’s curve) were studied. The results showed that the discharge current and potential increase by increasing the applied voltage ranging between 300-700 V. Discharge current increased as working pressure increased in the beginning, and then semi-stabilized (slight increase) starting from 1×100 mbar, while discharge potential decreased at the beginning as working pressure increased and then semi-stabilized at the same point at which discharge current stabilized. The Paschen’s curves were compared with each other. It was concluded that the lower breakdown voltage was associated with lower work function of the (Au, Cu, and Ag) cathode material. Breakdown voltages were (395, 398, and 420) for Ag, Cu and Au respectively.

تم في هذا البحث دراسة الخصائص الكهربائية لبلازما التفريغ التوهجي باستخدام منظومة الترذيذ الماكنتروني ذات التيار المستمر المحلية الصنع لتوليد بلازما التفريغ. كذلك أستخدم غاز الاركون لانتاج البلازما بمعدل تدفقSccm 40 وبمسافة فاصلة بين الاقطاب بمقدار cm4 وباستخدام مجهز قدرة عالي الفولتية. تم دراسة تأثير كل من دالة الشغل لاهداف مختلفة (ذهب، فضة ، نحاس) - بقطر 5 سم وسمك 1 ملم- على الفولتية المسلطة وضغط التشغيل على الخصائص الكهربائية (تيار التفريغ، جهد الكاثود ومنحنى باشن). أظهرت النتائج ان كلا من تيار التفريغ وجهد الكاثود يزداد بزيادة الفولتية المسلطة والذي يتراوح بين 300-700. ان تيار التفريغ يزداد مع زيادة الضغط المسلط في البداية ثم يستقر نسبياَ عند ضغط (زيادة ضئيلة ) ابتدأ من mbar1. بينما يقل جهد الكاثود مع زيادة الضغط المسلط ثم يستقر في نفس النقطة التي استقر فيها تيار التفريغ.لقد قورنت منحنيات باشن مع بعضها بالاعتماد على نوع مادة الهدف. وتم الاستنتاج ان جهد الانهيار يرتبط بدالة الشغل لكل من الذهب والفضة والنحاس.

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