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Formation of Mid-Infrared Slot Antenna Arrays on Thin Al2O3/Si Structures Fabricated by Atomic Layer Deposition

Authors: Amjd A. Salman --- Malik S. Ashoor
Journal: Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية ISSN: 18132065 23091673 Year: 2018 Volume: 14 Issue: 4 Pages: 25-28
Publisher: iraqi society for alternative and renewable energy sources and techniques الجمعية العراقية لمصادر وتقنيات الطاقة البديلة والمستجدة


The vertical distribution of the electric field enhancement produced by optical antennas could be experimentally confirmed. The combination of the antenna and a quantum cascade laser would yield attractive mid-infrared microscopic analysis to detect a solid state surface. In this work, slot antenna arrays were formed on a thin Al2O3 layer grown by atomic layer deposition on a silicon substrate. Reflectivity spectra measured in the mid-infrared range showed characteristic aspects, presumably caused by the surface phonon polariton of a SiO2 layer naturally formed on the Si substrate. When the Al2O3 layer thickness was 6 nm, such spectral features disappeared. In this way, we could estimate experimentally the electric field distribution normal to the surface of the substrate.

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